ESC Power Supply-2
High-reliability, long-life high-voltage power supply for ESC.
The ESC power supply is a DC power supply used for electrostatic adhesion of silicon wafers. By applying high voltage within the vacuum chamber, it generates electrostatic attraction between the silicon wafer and the ceramic plate. 【Features】 ■ Polarity reversal of HV output ■ Protection from surges and arcs generated during the process ■ Improved reliability through short-circuit and open-circuit protection circuits *For more details, please refer to the attached PDF and feel free to contact us directly at 047-369-3389.
- Company:P.R.A. 本社
- Price:Other